28 October 2016 Vacuum system for applying reflective coatings on large-size optical components using the method of magnetron sputtering
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Proceedings Volume 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 968307 (2016) https://doi.org/10.1117/12.2241517
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China
Abstract
Vacuum system for reflective coatings deposition on large-size optical components up to 4.0 m diameter using the method of magnetron sputtering was built at JSC LZOS. The technological process for deposition of reflective Al coating with protective SiO2 layer was designed and approved. After climatic tests the lifetime of such coating was estimated as 30 years. Uniformity of coating thickness ±5% was achieved on maximum diameter 4.0 m.
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Alexander A. Azerbaev, Magomed A. Abdulkadyrov, Sergey P. Belousov, Aleksandr N. Ignatov, Timur R. Mukhammedzyanov, "Vacuum system for applying reflective coatings on large-size optical components using the method of magnetron sputtering", Proc. SPIE 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 968307 (28 October 2016); doi: 10.1117/12.2241517; https://doi.org/10.1117/12.2241517
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