High-precision structure fabrication based on an etching resistance layer

Man Zhang; Qiling Deng; Lifang Shi; Axiu Cao; Hui Pang; Xin Liu; Jiazhou Wang; Song Hu

doi:10.1117/12.2245685

28 October 2016 High-precision structure fabrication based on an etching resistance layer

Man Zhang, Qiling Deng, Lifang Shi, Axiu Cao, Hui Pang, Xin Liu, Jiazhou Wang, Song Hu

Proceedings Volume 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 96830C (2016) https://doi.org/10.1117/12.2245685
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

The high-precision fabrication of micro-/nano-structure is a challenge. In this paper, we proposed a new fabrication method of high-precision structure based on an etching resistance layer. The high-precision features were fabricated by photolithography technique, followed by the etching process to transfer the features to the substrate. During this process, the etching uniformity and error lead to the feature distortion. We introduced an etching resistance layer between feature layer and substrate. The etching process will stop when arriving at the resistance layer. Due to the high precision of the plating film, the high-precision structure depth was achieved. In our experiment, we introduced aluminum trioxide as the etching resistance layer. The structures with low depth error of less than 5% were fabricated.

Citation Download Citation

Man Zhang, Qiling Deng, Lifang Shi, Axiu Cao, Hui Pang, Xin Liu, Jiazhou Wang, and Song Hu "High-precision structure fabrication based on an etching resistance layer", Proc. SPIE 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 96830C (28 October 2016); https://doi.org/10.1117/12.2245685

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available