In ultra-precision oblique axis grinding process for machining micro aspherical mould, form error of aspherical surface is caused by the inconsistence elastic deformation of grinding system, which derived from differences velocity from inside to out. In this case, whole PV value can meet requirements, however, pits are produced in central after error compensation, which is unworkable. In this paper, mechanism of machining error caused by grinding system rigidity is analyzed, and experiments are carried out. Form error compensation grinding are carried out in the central local area, based on traditional error compensation method, which can effectively eliminate the pits of surface center. In this method, cemented carbide YG8 which diameter is about 6mm is ground. The results showed that the form accuracy under PV 200 nm and under PV 50 nm within the scope of 1 mm, and the surface roughness under Ra2nm.