Effect of incident deposition angle on optical properties and surface roughness of TiO2 thin films

Yongqiang Pan; Chen Yang

doi:10.1117/12.2240559

28 October 2016 Effect of incident deposition angle on optical properties and surface roughness of TiO₂ thin films

Yongqiang Pan, Chen Yang

Proceedings Volume 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 96830U (2016) https://doi.org/10.1117/12.2240559
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

Optical properties, surface roughness and packing density of TiO₂ thin films are studied by obliquely deposited on K9 glass by electron beam evaporation. The surface roughness of TiO₂ thin films with different incident deposition angle is compared. The experimental results show that the transmittance increases and transmittance peak shifts to short wavelength with increasing incident deposition angle, the packing density of TiO₂ thin films decrease from 0.80 to 0.34 with incident deposition angle increasing from 0° to 75°. The surface roughness of TiO₂thin films increase with increasing incident deposition angle. The surface roughness of TiO₂ thin films is slightly bigger than the surface roughness of K9 substrate when the incident deposition angle is 75°. When the incident deposition angle is constant, TiO₂ thin films surface roughness decrease with increase of film thickness.

Citation Download Citation

Yongqiang Pan and Chen Yang "Effect of incident deposition angle on optical properties and surface roughness of TiO₂ thin films", Proc. SPIE 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 96830U (28 October 2016); https://doi.org/10.1117/12.2240559

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