28 October 2016 Study on machining deformation of the ultra-thin mirror
Author Affiliations +
Proceedings Volume 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 968318 (2016) https://doi.org/10.1117/12.2243317
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China
Abstract
In shape processing of the ultra-thin mirror, deformation will be produced under cutting forces, which is a major cause of quality deterioration. An ultra-thin mirror with diameter-thickness ratio more than 10 is studied in this paper. Rigidity characteristic of the grinding process by diamond wheel is analyzed by FEM. A receptance model of the micro-cutting process and the surface accuracy is established by a self-adaptive multi-scale method according the first strength method. And the effectiveness of the mathematical model is verified by experience. And the dynamic stiffness caused by grinding is optimized. As a result, deformation of the optical surface is reduced to 0.004λ and the acceptable surface accuracy can be achieved.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hao Zhang, Peng Wang, "Study on machining deformation of the ultra-thin mirror", Proc. SPIE 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 968318 (28 October 2016); doi: 10.1117/12.2243317; https://doi.org/10.1117/12.2243317
PROCEEDINGS
6 PAGES


SHARE
Back to Top