As a practical engineering device, laser gyro has replaced other types of gyro and become the dominant product of inertial navigation devices, and the mirror substrate is the key part for successful development of laser gyro. Normally, the mirror must have a high reflectivity, for example 99.99% or more, but the premise is that the super smooth surface with the order of Å must be fabricated first 1. In the process of super smooth surface, grinding procedure is a very important step; its quality determines the subsurface damage depth of the mirror. In this paper, based on optical quartz glass as the study object, three different size abrasives are used to grind the blank respectively; then the particle size distribution, surface roughness and microstructure are tested; finally, angle polishing method to measure subsurface damage depth is adopted. Some reasonable theory parameters are obtained through analysis of the test data, also having certain significance for practice.