Effect of oxygen flow on the structure and optical properties of the Gd2O3 optical films

Siyu Wang; Ping Ma; Yunti Pu; Zhao Qiao; Mingxiao Zhang; Zhongwen Lu; Dongxu Peng

doi:10.1117/12.2244275

28 October 2016 Effect of oxygen flow on the structure and optical properties of the Gd₂O₃ optical films

Siyu Wang, Ping Ma, Yunti Pu, Zhao Qiao, Mingxiao Zhang, Zhongwen Lu, Dongxu Peng

Proceedings Volume 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 968325 (2016) https://doi.org/10.1117/12.2244275
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

Gd₂O₃thin films were deposited by Ion-beam sputtering (IBS) under the oxygen flow of 0 sccm～30 sccm. The structure and optical properties of the Gd₂O₃ optical films were investigated by Lambdar950 spectrophotometer, laser calorimetry and atomic force microscopy (AFM). When oxygen flow was less than 10 sccm, with the increase of oxygen flow, the transmittance of the films increased, at the same time absorptance and the surface roughness of the films decreased. While the flow was more than 10 sccm, with the increase of the flow rate, the surface roughness of the films increased, but the transmittance and absorptance did not show any apparent change. The results show that both the structure and optical properties are closely related to the flow of oxygen. XPS measurements demonstrated that when the oxygen flow increase from 0 sccm to 10 sccm, the defect oxygen decreases. But when the oxygen flow increase from 10 sccm to 30 sccm, the defect oxygen increase. The XPS spectra show that when the oxygen flow was 10 sccm, the defect oxygen was the least. Thus when the oxygen flow was 10 sccm, the structure and optical properties of the Gd₂O₃ optical films were the best.

Citation Download Citation

Siyu Wang, Ping Ma, Yunti Pu, Zhao Qiao, Mingxiao Zhang, Zhongwen Lu, and Dongxu Peng "Effect of oxygen flow on the structure and optical properties of the Gd₂O₃ optical films", Proc. SPIE 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 968325 (28 October 2016); https://doi.org/10.1117/12.2244275

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