Research on large aperture multi-angle multi-surface mirror process technology

Ying Huang; Manze He; Dingyao Yan; Yibin Liu

doi:10.1117/12.2244009

28 October 2016 Research on large aperture multi-angle multi-surface mirror process technology

Ying Huang, Manze He, Dingyao Yan, Yibin Liu

Proceedings Volume 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 96832C (2016) https://doi.org/10.1117/12.2244009
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

Light weighted multi-angle multi-surface mirror is made of glass-ceramic, with the structural characteristic of multicavity thin wall, high precision of surface figure and angle between surfaces, has very different processing technology with traditional solid mirror. Based on the 460mm×434mm×80mm multi-angle multi-surface mirror, glass combination manufacture method and relevant interferometry of angle measurement was designed. The process technology was studied, then the consistency of angle between surfaces and the influence on multi-cavity thin wall deformation of lateral surface and material of polishing pad on the surface figure processing were controlled. The model between the variation of angle and load was established, from which the hysteresis of angle variation was analyzed, then the prototype workpiece was finished. The difficult problem on synchronically controlling the surface angles and surface figure of the mirror, which has high center of gravity and multi-cavity thin wall, was solved. The lateral surface figure was controlled below λ/6 (PV, λ=632.8nm), and the perpendicularity of lateral surfaces were controlled below 5''.

Citation Download Citation

Ying Huang, Manze He, Dingyao Yan, and Yibin Liu "Research on large aperture multi-angle multi-surface mirror process technology", Proc. SPIE 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 96832C (28 October 2016); https://doi.org/10.1117/12.2244009

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KEYWORDS

Mirrors

Surface finishing

Polishing

Glasses

Interferometry

Polishing equipment

Manufacturing

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