Near infrared reflective shearing point diffraction interferometer for dynamic wavefront measurement

Wenhua Zhu; Lei Chen; Donghui Zheng

doi:10.1117/12.2240632

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27 September 2016 Near infrared reflective shearing point diffraction interferometer for dynamic wavefront measurement

Wenhua Zhu; Lei Chen; Donghui Zheng

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Proceedings Volume 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment; 968405 (2016) https://doi.org/10.1117/12.2240632
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

A near infrared reflective shearing point diffraction interferometer (NIRSPDI) is designed for large-aperture dynamic wave-front measurement. The PDI is integrated on the small substrate with properly designed thin film. The wave-front under test is reflected by the front and rear surfaces of the substrate respectively to generate an interferogram with high linear-carrier frequency, which is used to reconstruct the wave-front by means of the Fourier transform algorithm. In this article, the system error and the major parameters of NIRSPDI are discussed. In addition, we give an effective method to adjust NIRSPDI for fast measurement. Experimentally NIRSPDI was calibrated by a standard spherical surface and then it was applied to the dynamic wave-front with a diameter of 400mm. The measured results show the error of whole system which verifies that the proposed NIRSPDI is a powerful tool for large-aperture dynamic wave-front measurement.

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Wenhua Zhu, Lei Chen, and Donghui Zheng "Near infrared reflective shearing point diffraction interferometer for dynamic wavefront measurement", Proc. SPIE 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 968405 (27 September 2016); https://doi.org/10.1117/12.2240632