We realized the manufacture, alignment and test for the RT optics of a longwave infrared spectromter by CMM and interferometer. Wavefront error test by interferometer and surface profiles measured by profilometer indicate that performances of the manufactured mirrors exceed the requirements. Interferogram of the assembled RT optics shows that wavefront error rms is less than 0.0493λ@10.6μm vs design result 0.0207λ.
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Liyin Yuan, Zhiping He, Yueming Wang, Gang Lv, "Manufacture, alignment and measurement for a reflective triplet optics in imaging spectrometer," Proc. SPIE 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 96840B (27 September 2016);