A novel way of squareness measurement on ultra-precision motion stage basing on the error separation

Tao Lai; Xiaoqiang Peng; Guipeng Tie; Junfeng Liu; Meng Guo

doi:10.1117/12.2243406

27 September 2016 A novel way of squareness measurement on ultra-precision motion stage basing on the error separation

Tao Lai, Xiaoqiang Peng, Guipeng Tie, Junfeng Liu, Meng Guo

Proceedings Volume 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment; 96840D (2016) https://doi.org/10.1117/12.2243406
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

The precision of traditional squareness measurement on ultra-precision motion stage is mostly determined by the standard component, such as bare L-square and optical pentaprism, and the measurement precision is lower than the precision of the standard component. Based on the error separation, this paper presents a novel method of squareness measurement with an optical square brick. The angles between the guide and the four lines of the section of the brick are measured, and the squareness error distraction is achieved by the truth that the internal angle sum of a tetragon is 360°. A squareness measurement test is carried out on the coordinate measuring machine (CMM) by using an optical square brick with the squareness error of 0.3°. The results show that the local squareness and uncertainties between the X axis and Y axis of the CMM are 2.5arcsec and 0.5arcsec respectively. The measurement precision is higher than the precision of the brick and the feasibility and accuracy of the method are validated.

Citation Download Citation

Tao Lai, Xiaoqiang Peng, Guipeng Tie, Junfeng Liu, and Meng Guo "A novel way of squareness measurement on ultra-precision motion stage basing on the error separation", Proc. SPIE 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 96840D (27 September 2016); https://doi.org/10.1117/12.2243406

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available