27 September 2016 A novel way of squareness measurement on ultra-precision motion stage basing on the error separation
Author Affiliations +
Proceedings Volume 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment; 96840D (2016) https://doi.org/10.1117/12.2243406
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China
Abstract
The precision of traditional squareness measurement on ultra-precision motion stage is mostly determined by the standard component, such as bare L-square and optical pentaprism, and the measurement precision is lower than the precision of the standard component. Based on the error separation, this paper presents a novel method of squareness measurement with an optical square brick. The angles between the guide and the four lines of the section of the brick are measured, and the squareness error distraction is achieved by the truth that the internal angle sum of a tetragon is 360°. A squareness measurement test is carried out on the coordinate measuring machine (CMM) by using an optical square brick with the squareness error of 0.3°. The results show that the local squareness and uncertainties between the X axis and Y axis of the CMM are 2.5arcsec and 0.5arcsec respectively. The measurement precision is higher than the precision of the brick and the feasibility and accuracy of the method are validated.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tao Lai, Xiaoqiang Peng, Guipeng Tie, Junfeng Liu, Meng Guo, "A novel way of squareness measurement on ultra-precision motion stage basing on the error separation", Proc. SPIE 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 96840D (27 September 2016); doi: 10.1117/12.2243406; https://doi.org/10.1117/12.2243406
PROCEEDINGS
6 PAGES


SHARE
Back to Top