Mounting of reference surface for a transmission sphere

Wei-Jei Peng; Cheng-Fang Ho; Zong-Ru Yu; Chien-Yao Huang; Ching-Hsiang Kuo; Wei-Yao Hsu

doi:10.1117/12.2242360

27 September 2016 Mounting of reference surface for a transmission sphere

Wei-Jei Peng, Cheng-Fang Ho, Zong-Ru Yu, Chien-Yao Huang, Ching-Hsiang Kuo, Wei-Yao Hsu

Proceedings Volume 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment; 96840G (2016) https://doi.org/10.1117/12.2242360
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

The mounting design of a reference surface for a 6-in transmission sphere is presented in this paper. To achieve highprecision measurement in interferometry, the reference wavefront error should be controlled within peak-to-valley (PV) 0.1 λ (λ=0.6328 um) for subtraction in calibration. The reference wavefront error includes the system aberration error and the irregularity of the reference surface. When a transmission sphere is well aligned, the reference wavefront error is dominated by the reference surface. The mounting of the reference surface is imperative because the surface deformation of the reference surface after mounting needs to be lower than 0.1 λ. Besides the mounting deformation, self-weight deformation is also considerable for large optics, such as 6-in reference surface in our study. Consequently, a semikinematic mounting is applied using three small contact areas to avoid over constraint. The transmission sphere in our study is vertically tested on QED aspheric stitching interferometer (ASI), and then the trefoil aberration is occurred. There are two methods to decrease surface deformation after mounting, including deformation correction using computer control optical surfacing (CCOS) and adding soft supporting between hard mounting. In this study, three soft supports are used to share the loads of three rigid supports and then to minimize surface deformation due to gravity. Mounting design and experiments are described in this paper. Finally, the reference wavefront error of the prototype is successfully restrained within 0.1 λ in measurement.

Citation Download Citation

Wei-Jei Peng, Cheng-Fang Ho, Zong-Ru Yu, Chien-Yao Huang, Ching-Hsiang Kuo, and Wei-Yao Hsu " Mounting of reference surface for a transmission sphere", Proc. SPIE 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 96840G (27 September 2016); https://doi.org/10.1117/12.2242360

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
7 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Wavefronts

Optical spheres

Photovoltaics

Optical mounts

Surface finishing

Monochromatic aberrations

Prototyping

Show All Keywords

Keywords/Phrases

Search In:

Publication Years