27 September 2016 Phase measurement profilometry based on a virtual reference plane method
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Proceedings Volume 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment; 96840J (2016) https://doi.org/10.1117/12.2245564
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China
Abstract
In Phase Measurement Profilometry(PMP), the setting of the reference plane plays an important role. It is a critical step to capture the grating fringe projected onto the reference plane in PMP. However, it is sometimes difficult to choose and place the reference plane in practical applications. In this paper, a virtual reference plane is introduced into PMP, with which 3D measurement can be realized without using the physical reference plane. The virtual reference plane is generated through extracting a partial area of the deformed fringe image that corresponds to a planar region and employing the interpolation algorithm. The method is proved theoretically through simulation experiments, providing a new suggestion for actual measurement by PMP.
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Hongbing Ren, Hongbing Ren, Jinlong Lee, Jinlong Lee, Xiaorong Gao, Xiaorong Gao, } "Phase measurement profilometry based on a virtual reference plane method", Proc. SPIE 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 96840J (27 September 2016); doi: 10.1117/12.2245564; https://doi.org/10.1117/12.2245564
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