Phase measurement profilometry based on a virtual reference plane method

Hongbing Ren; Jinlong Lee; Xiaorong Gao

doi:10.1117/12.2245564

27 September 2016 Phase measurement profilometry based on a virtual reference plane method

Hongbing Ren, Jinlong Lee, Xiaorong Gao

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Proceedings Volume 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment; 96840J (2016) https://doi.org/10.1117/12.2245564
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

In Phase Measurement Profilometry(PMP), the setting of the reference plane plays an important role. It is a critical step to capture the grating fringe projected onto the reference plane in PMP. However, it is sometimes difficult to choose and place the reference plane in practical applications. In this paper, a virtual reference plane is introduced into PMP, with which 3D measurement can be realized without using the physical reference plane. The virtual reference plane is generated through extracting a partial area of the deformed fringe image that corresponds to a planar region and employing the interpolation algorithm. The method is proved theoretically through simulation experiments, providing a new suggestion for actual measurement by PMP.

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Hongbing Ren, Jinlong Lee, and Xiaorong Gao "Phase measurement profilometry based on a virtual reference plane method", Proc. SPIE 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 96840J (27 September 2016); https://doi.org/10.1117/12.2245564

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KEYWORDS

3D metrology

Fringe analysis

Phase measurement

3D image processing

Phase shift keying

Error analysis

Modulation

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