27 September 2016 High resolution aspheric surface measurement technology based on laser interferometer
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Proceedings Volume 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment; 96840Q (2016) https://doi.org/10.1117/12.2244155
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China
Abstract
In order to develop an aspheric surface measurement standard device to provide reliable and traceable measurement and calibration, a high resolution aspheric surface measurement technology based on laser interferometer is proposed in this paper. A laser interferometer with frequency stabilized He-Ne laser is used to provide traceable measurements. The standard device would provide calibrations for different kinds of aspheric surface, therefore the interferometer used in the standard device would be influenced by various factors, such as roughness, reflectivity, material and slope angle. The influences of reflectivity and roughness are analyzed. A compensation method based on the analysis is applied in the signal processing system to reduce the influences of reflectivity and roughness. An objective lens is used to collect the measurement beam reflected from the target. The laser interferometer is set up and tested under different conditions: the reflectivity is 1%~100%, the surface roughness is 0.012~0.8μm. Experimental results show that the measurement resolution of the developed interferometer is at the nanometer level.
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Xiaofei Diao, Xiaofei Diao, Zi Xue, Zi Xue, Yanhui Kang, Yanhui Kang, } "High resolution aspheric surface measurement technology based on laser interferometer", Proc. SPIE 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 96840Q (27 September 2016); doi: 10.1117/12.2244155; https://doi.org/10.1117/12.2244155
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