27 September 2016 Research on auto-centering device in surface defects evaluation system of large spherical optics
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Proceedings Volume 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment; 96841N (2016) https://doi.org/10.1117/12.2243299
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China
Abstract
For the Spherical Surface Defects Evaluation System (SSDES), lens centering is essential to obtain the precise scanning trace and defect features without mismatch. Based on a combination of auto-collimating microscopy and Computer-Aided Alignment (CAA), an auto-centering system that can measure the deviation of large spherical center with respect to a reference rotation axis rapidly and accurately is established in this paper. The auto-centering system allows the closedloop feedback control of spherical center according to the different images of the crosshair reticle on CCD. Image entropy algorithm is employed to evaluate image clarity determined by the auto-focus experiment of 50μm step-length. Subsequently, an improved algorithm that can search the crosshair center automatically is proposed to make the trajectory of crosshair images and the position of rotation axis more reliable based on original circle fitting algorithm by the least square method (LSM). The comparison results indicates to show the high accuracy and efficiency of the proposed fitting method with LSM.
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Yihui Zhang, Yihui Zhang, Yongying Yang, Yongying Yang, Fan Wu, Fan Wu, Huiting Chai, Huiting Chai, Kai Yan, Kai Yan, Lin Zhou, Lin Zhou, Yang Li, Yang Li, Dong Liu, Dong Liu, Jian Bai, Jian Bai, Yibing Shen, Yibing Shen, Pin Cao, Pin Cao, } "Research on auto-centering device in surface defects evaluation system of large spherical optics", Proc. SPIE 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 96841N (27 September 2016); doi: 10.1117/12.2243299; https://doi.org/10.1117/12.2243299
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