Evaluating surface repeatability for interferometric measurement: a comparative study

Haiyang Quan; Hou Xi; Fan Wu

doi:10.1117/12.2243301

27 September 2016 Evaluating surface repeatability for interferometric measurement: a comparative study

Haiyang Quan, Hou Xi, Fan Wu

Proceedings Volume 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment; 96842M (2016) https://doi.org/10.1117/12.2243301
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

The result of an interferometric surface figure measurement is a height map, from which single parametric descriptors (for example the RMS) or residual maps are the most commonly used methods for determining the measurement repeatability. An alternate technique based on a standard deviation matrix is used to better describe the variation among successive measurements. A standard deviation matrix is acquired by computing standard deviation of the height map pixel by pixel. Only one standard deviation matrix can provide a spatial description of the repeatability as well as parametric descriptors (for example the mean) of the standard deviation matrix. Comparative study on the evaluation of measurement repeatability among different methods is shown by both simulation and experiment. It seems that the standard deviation matrix method is more valid to detect the variation than other techniques in the measurement of surface figure.

Citation Download Citation

Haiyang Quan, Hou Xi, and Fan Wu "Evaluating surface repeatability for interferometric measurement: a comparative study", Proc. SPIE 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 96842M (27 September 2016); https://doi.org/10.1117/12.2243301

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KEYWORDS

Interferometry

Calibration

Computer simulations

Monochromatic aberrations

Photovoltaics

Interferometers

Optical spheres

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