27 September 2016 Measurement of z-axis deviation angle of electro-optic crystal by conoscopic interference
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Proceedings Volume 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment; 96842U (2016) https://doi.org/10.1117/12.2242155
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China
Abstract
Properties of plasma electrode pockels cell is directly affected by the Z-axis deviation angle of the electro-optic crystal. Therefore, high precision measurement of the Z-axis deviation angle is indispensable. By using conoscopic interference technique, a measurement system for Z-axis deviation angle of electro-optic crystal is introduced. The principle of conoscopic interference method is described in detail, and a series of techniques are implied in this measurement system to improve the accuracy. High-precision positioning method of the crystal based on Michelson interference is proposed to determine the normal consistency of crystal, which can ensure the high positioning repeatability of crystal in the measurement process. The positioning comparison experiment of the crystal shows that the standard deviation of our method is less than 1pixel, which is much better than the traditional method (nearly 4pixels). Moreover, melatope extraction algorithm of optical axis based on image matching technique is proposed to ensure the melatope can be extracted in high precision. Calibration method of the normal of transmission surface of crystal is also proposed. The experiment results show that the PV and rms of Z-axis deviation angle is less than 0.05mrad and 0.02mrad, respectively. The repeatability accuracy is less than 0.01mrad.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dong Li, Yong Liu, Xu Liu, Hongzhen Jiang, Fanglan Zheng, "Measurement of z-axis deviation angle of electro-optic crystal by conoscopic interference", Proc. SPIE 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 96842U (27 September 2016); doi: 10.1117/12.2242155; https://doi.org/10.1117/12.2242155
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