27 September 2016 Interferometry measurement of parallel optical plate wavefront
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Proceedings Volume 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment; 96843J (2016) https://doi.org/10.1117/12.2246099
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China
Abstract
In this paper, a method is introduced to test wavefront aberration of parallel optical plate wavefront, which based on Fourier transform. When testing the wavefront aberration of parallel optical plate, there is multiple-surface interference which phase-shifting interferometry cannot handle with. With the help of wavelength-modulation phase-shifting interferometry and Fourier transform, this method can isolate the multiple-surface interference fringes in frequency domain. This paper expound the principle of the method, and analyze the key parameter of the testing method: the suitable cavity/thickness ratio and sampling frame number. A simulation experiment is set up to verify the accuracy of this method, then the comparison test with traditional method shows that the relative deviation between the two methods is ≤5%.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yi Yang, Yi Yang, Huan Ren, Huan Ren, Zhendong Shi, Zhendong Shi, Yong Liu, Yong Liu, Xu Liu, Xu Liu, Quan Yuan, Quan Yuan, Xiaoyu Yang, Xiaoyu Yang, Lin Zhang, Lin Zhang, } "Interferometry measurement of parallel optical plate wavefront", Proc. SPIE 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 96843J (27 September 2016); doi: 10.1117/12.2246099; https://doi.org/10.1117/12.2246099
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