Dual-wavelength method for measuring the thickness of HSQ photoresist

Shun Yao; Bo Yu; Jingcheng Jin; Chun Li

doi:10.1117/12.2246196

27 September 2016 Dual-wavelength method for measuring the thickness of HSQ photoresist

Shun Yao, Bo Yu, Jingcheng Jin, Chun Li

Proceedings Volume 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment; 968442 (2016) https://doi.org/10.1117/12.2246196
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

The reflectivity of thin film changes periodically with the increase of its thickness. According to this effect, we present a dual-wavelength method for measuring the thickness of HSQ film. At first, the refractive index of HSQ was measured by a spectroscopic ellipsometer. Then the relationship between the thickness of HSQ and the reflectivity was deduced. At last, the thickness of HSQ was calculated using the reflectivity measured by a spectrograph. The method was proved to be simple and effective.

Citation Download Citation

Shun Yao, Bo Yu, Jingcheng Jin, and Chun Li "Dual-wavelength method for measuring the thickness of HSQ photoresist", Proc. SPIE 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 968442 (27 September 2016); https://doi.org/10.1117/12.2246196

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