27 September 2016 Analysis of adjustment error in aspheric null testing with CGH
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Proceedings Volume 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment; 968444 (2016) https://doi.org/10.1117/12.2243226
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China
Abstract
Generally, in order to gain high accuracy in aspheric testing, a piece of high-quality CGH (computer generated hologram) is inserted behind transmission sphere to generate specified wave-front to match aspheric part. According to the difference in function, the CGH is divided into 2 parts: the center region, called as testing hologram, is used to generate specified aspheric wave-front; the outer ring, called as alignment hologram, is used to align the location of CGH behind transmission sphere. Although alignment hologram is used, there is still some adjustment error from both CGH and aspheric part, such as tilt, eccentricity and defocus. Here we will stimulate the effect of these error sources on the accuracy that is rms after the piston, tilt and power are removed, when testing a specified aspheric part. It is easy to conclude that the total measurement error is about 2 nm and the defocus of CGH contributes most.
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Yiwei He, Yiwei He, Hou Xi, Hou Xi, Qiang Chen, Qiang Chen, Fan Wu, Fan Wu, Chaoqiang Li, Chaoqiang Li, Xiaoqiang Zhu, Xiaoqiang Zhu, Weihong Song, Weihong Song, } "Analysis of adjustment error in aspheric null testing with CGH", Proc. SPIE 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 968444 (27 September 2016); doi: 10.1117/12.2243226; https://doi.org/10.1117/12.2243226
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