25 October 2016 Fabrication of polymer-based multimode interference optical splitters by UV-based soft imprint lithography
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Abstract
A polymer-based multimode interference (MMI) optical splitter chip has been fabricated through UV-based soft imprint lithography (Soft UV-NIL) technique. Propagation loss and bending loss are considered during the chip design in order to decrease the insertion loss. UV curable fluorinated acrylate resin is used due to its low material absorbing loss. 1×4 cascaded MMI splitter is fabricated and measured at 1550 nm optical wavelength and an average 12.38 dB insertion loss is obtained together with an 1.23 dB uniformity.
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Yuxin Liang, Xiuyou Han, Yuqing Luo, Yiying Gu, Zhenlin Wu, Mingshan Zhao, "Fabrication of polymer-based multimode interference optical splitters by UV-based soft imprint lithography", Proc. SPIE 9685, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 968503 (25 October 2016); doi: 10.1117/12.2243625; https://doi.org/10.1117/12.2243625
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