25 October 2016 Static characteristics design of hydrostatic guide-ways based on fluid-structure interactions
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Abstract
With the raising requirements in micro optical systems, the available machines become hard to achieve the process dynamic and accuracy in all aspects. This makes compact design based on fluid/structure interactions (FSI) important. However, there is a difficulty in studying FSI with oil film as fluid domain. This paper aims at static characteristic design of a hydrostatic guide-way with capillary restrictors based on FSI. The pressure distribution of the oil film land is calculated by solving the Reynolds-equation with Galerkin technique. The deformation of structure is calculated by commercial FEM software, MSC. Nastran. A matlab program is designed to realize the coupling progress by modifying the load boundary in the submitting file and reading the deformation result. It’s obvious that the stiffness of the hydrostatic bearing decreases with the weakening of the bearing structure. This program is proposed to make more precise prediction of bearing stiffness.
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Shuo Lin, Shuo Lin, YueHong Yin, YueHong Yin, "Static characteristics design of hydrostatic guide-ways based on fluid-structure interactions", Proc. SPIE 9685, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 96850R (25 October 2016); doi: 10.1117/12.2241646; https://doi.org/10.1117/12.2241646
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