25 October 2016 A deformable plane-parallel optical plate with 16 actuated points for low order aberrations correction
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Proceedings Volume 9686, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices; 968605 (2016) https://doi.org/10.1117/12.2241405
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China
Abstract
Since the microlithography with high number aperture(NA) projection objectives requires the correction of thermal lens aberrations, a deformable plane-parallel optical plate with continuous facesheet, 16 discrete actuators has been designed from the elasticity theory. Both axial forces and tangential bending moments are applied to the discrete position outside the clear aperture. The deformable plate needs to meet the condition that each actuator can generate a positive or a negative axial force. The deformable plate has been simulated by finite element modeling (FEM), the results show that the difference between the simulation force and the theory force is always less than 0.064N when the deformation is one of Z4-8 low order Zernike modes with 100nm coefficient, the axial forces are minor and the fitting errors of the aberrations are less than 5%.
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Min Zhang, Min Zhang, Lei Zhao, Lei Zhao, Lijian Dong, Lijian Dong, Yongxin Sui, Yongxin Sui, Huaijiang Yang, Huaijiang Yang, } "A deformable plane-parallel optical plate with 16 actuated points for low order aberrations correction", Proc. SPIE 9686, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices, 968605 (25 October 2016); doi: 10.1117/12.2241405; https://doi.org/10.1117/12.2241405
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