25 October 2016 Synthesis and characterization of lithium tantalate thin films fabricated by sol-gel method
Author Affiliations +
Proceedings Volume 9686, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices; 968611 (2016) https://doi.org/10.1117/12.2242862
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China
Abstract
Multilayer lithium tantalate thin films have been successfully prepared on Pt/Ti/SiO2/Si(100) substrate using sol-gel and spin-coating method. Polycrystalline perovskite films were obtained through pyrolysis at 400°C and subsequent calcination at various temperatures from 500°C to 700°C for 1h, which were optimized by means of X-ray diffraction, Raman spectroscopy and thermal analysis. The morphology on the top surface and fractured cross section of LT films was observed by a field-emission scanning electron microscope. The 300 nm thick LT film annealed at 650°C exhibited a dielectric constant of 19.8 and a loss tangent of 0.06 at10KHz.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Binwei Sun, Dong Pan, Zehua Huang, Jun Wang, Yadong Jiang, "Synthesis and characterization of lithium tantalate thin films fabricated by sol-gel method", Proc. SPIE 9686, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices, 968611 (25 October 2016); doi: 10.1117/12.2242862; https://doi.org/10.1117/12.2242862
PROCEEDINGS
6 PAGES


SHARE
Back to Top