25 October 2016 Evaluation of figure accuracy of Wolter mirror fabricated by electroforming
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Abstract
The Wolter mirror is a promising imaging device for soft x-ray microscopy owing to its excellent characteristics. Its annular aperture enables high-NA design while maintaining high photon transfer efficiency. However, its deep and narrow cylinder-like shape makes its fabrication difficult. Despite its long history, the Wolter mirror has not been practically used for high-resolution microscopy. We have been developing a fabrication process for grazing incidence mirrors with rotationally symmetric shapes. The mirrors are replicated from precisely machined mandrels. We employ electroforming as a replication method with high replication accuracy and reproductivity. Here, we report the first fabrication of a Wolter mirror and discuss the replication quality in electroforming. The imaging quality of Wolter mirror is also evaluated in an observation experiment using a visible-light microscope.
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Satoru Egawa, Satoru Egawa, Takehiro Kume, Takehiro Kume, Yoko Takeo, Yoko Takeo, Yoshinori Takei, Yoshinori Takei, Hiroto Motoyama, Hiroto Motoyama, Hidekazu Mimura, Hidekazu Mimura, } "Evaluation of figure accuracy of Wolter mirror fabricated by electroforming ", Proc. SPIE 9687, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics, 968705 (25 October 2016); doi: 10.1117/12.2243422; https://doi.org/10.1117/12.2243422
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