25 October 2016 Progress in upgrading a long trace profiler at NSRRC
Author Affiliations +
A long trace profiler in NSRRC is used to develop a bendable mirror, for the mirror-mounting mechanism and to inspect the mirrors of TPS beamlines. We upgraded the air bearing, the motor and gear, the penta-mirror, the CCD and the software. ELCOMATT 3000 is our calibration reference. To maintain constant the measurement of the optical path, we adopted a scheme for a moving optical head that decreases the various optical paths through a focusing lens to avoid lens homogeneity. The measurement environment (temperature, vibration, air turbulence) is effectively controlled. In measuring a curved mirror (radius 9.7 m), the repeatability is below 0.1 μrad. This paper describes the upgraded performance and engineering details.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Duan-Jen Wang, Duan-Jen Wang, Shang-Wei Lin, Shang-Wei Lin, Shen-Yaw Perng, Shen-Yaw Perng, } "Progress in upgrading a long trace profiler at NSRRC", Proc. SPIE 9687, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics, 96870F (25 October 2016); doi: 10.1117/12.2247664; https://doi.org/10.1117/12.2247664

Back to Top