Paper
17 January 1989 Bonding, Interfacial Effects And Adhesion In DLC.
A. Grill, B. S. Meyerson, V. Patel
Author Affiliations +
Abstract
Metastable, amorphous carbon films, also referred to as diamond-like carbon (DLC), are prepared in a large variety of deposition conditions. Depending upon the conditions, DLC films may contain large amounts of hydrogen, and are referred to as hydrogenated amorphous carbon. The properties of DLC are strongly dependent on the preparation conditions and upon the amount of hydrogen incorporated in the film. Due to its extreme hardness, DLC can be used as a wear protective coating, while its chemical inertness to acids and alkali's make it suitable for protection against chemical attack. The optical transparency of the DLC over a large region of the spectrum makes it useful as a protective coating of optical components. However, hydrogenated DLC is usually also characterized by very high compressive stresses. Its application as a protective coating therefore requires strong adhesive bonds to the coated surface. The paper reviews structural and optical properties of DLC films and means of improving their adhesion to metallic surfaces.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. Grill, B. S. Meyerson, and V. Patel "Bonding, Interfacial Effects And Adhesion In DLC.", Proc. SPIE 0969, Diamond Optics, (17 January 1989); https://doi.org/10.1117/12.948140
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CITATIONS
Cited by 4 scholarly publications and 2 patents.
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KEYWORDS
Carbon

Hydrogen

Diamond

Plasma enhanced chemical vapor deposition

Silicon

Chemical species

Coating

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