Surface Morphology And Defect Structures In Microwave CVD Diamond Films

Koji Kobashi; Kozo Nishimura; Koichi Miyata; Yoshio Kawate; Jeffrey T. Glass; Bradley E. Williams

doi:10.1117/12.948165

17 January 1989 Surface Morphology And Defect Structures In Microwave CVD Diamond Films

Koji Kobashi, Kozo Nishimura, Koichi Miyata, Yoshio Kawate, Jeffrey T. Glass, Bradley E. Williams

Proceedings Volume 0969, Diamond Optics; (1989) https://doi.org/10.1117/12.948165
Event: 32nd Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1988, San Diego, CA, United States

Abstract

Polycrystalline diamond films were deposited by the microwave-plasma chemical-vapor-deposition (CVD) on Si substrates using a mixture of methane and hydrogen for the source gas. In the morphology study of diamond films using a scanning electron microscope (SEM), it was found that upon increasing the methane concentration (hereafter denoted by c in units of vol%), the surface texture changed discontinuously from (111) to (100) at around c=0.4%, and gradually from (100) to microcrys-talline above c=1.2%. The diamond-Si interfaces and the defect struc-tures in the films were investigated by transmission electron micro-scopy (TEM). The film growth process was investigated by SEM, and it was found that the appearance of small grains and the formation of well-defined diamond faces took place repeatedly with time during the CVD synthesis. The film morphology of boron-doped diamond films on Si substrates and on non-doped diamond films were also presented.

Citation Download Citation

Koji Kobashi, Kozo Nishimura, Koichi Miyata, Yoshio Kawate, Jeffrey T. Glass, and Bradley E. Williams "Surface Morphology And Defect Structures In Microwave CVD Diamond Films", Proc. SPIE 0969, Diamond Optics, (17 January 1989); https://doi.org/10.1117/12.948165

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available