15 March 2016 Dynamic performance of MEMS deformable mirrors for use in an active/adaptive two-photon microscope
Author Affiliations +
Abstract
Active optics can facilitate two-photon microscopic imaging deep in tissue. We are investigating fast focus control mirrors used in concert with an aberration correction mirror to control the axial position of focus and system aberrations dynamically during scanning. With an adaptive training step, sample-induced aberrations may be compensated as well. If sufficiently fast and precise, active optics may be able to compensate under-corrected imaging optics as well as sample aberrations to maintain diffraction-limited performance throughout the field of view. Toward this end we have measured a Boston Micromachines Corporation Multi-DM 140 element deformable mirror, and a Revibro Optics electrostatic 4-zone focus control mirror to characterize dynamic performance. Tests for the Multi-DM included both step response and sinusoidal frequency sweeps of specific Zernike modes. For the step response we measured 10%-90% rise times for the target Zernike amplitude, and wavefront rms error settling times. Frequency sweeps identified the 3dB bandwidth of the mirror when attempting to follow a sinusoidal amplitude trajectory for a specific Zernike mode. For five tested Zernike modes (defocus, spherical aberration, coma, astigmatism and trefoil) we find error settling times for mode amplitudes up to 400nm to be less than 52 us, and 3 dB frequencies range from 6.5 kHz to 10 kHz. The Revibro Optics mirror was tested for step response only, with error settling time of 80 μs for a large 3 um defocus step, and settling time of only 18 μs for a 400nm spherical aberration step. These response speeds are sufficient for intra-scan correction at scan rates typical of two-photon microscopy.
Conference Presentation
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christian C. Zhang, Christian C. Zhang, Warren B. Foster, Warren B. Foster, Ryan D. Downey, Ryan D. Downey, Christopher L. Arrasmith, Christopher L. Arrasmith, David L. Dickensheets, David L. Dickensheets, "Dynamic performance of MEMS deformable mirrors for use in an active/adaptive two-photon microscope", Proc. SPIE 9717, Adaptive Optics and Wavefront Control for Biological Systems II, 97170G (15 March 2016); doi: 10.1117/12.2216331; https://doi.org/10.1117/12.2216331
PROCEEDINGS
12 PAGES + PRESENTATION

SHARE
RELATED CONTENT

Spherical aberration correction of adaptive lenses
Proceedings of SPIE (February 20 2017)
Low-order AO system in LAMOST
Proceedings of SPIE (June 27 2006)
Correctability modeling of a large deformable mirror
Proceedings of SPIE (May 30 1994)
Applications of MEMS in segmented mirror space telescopes
Proceedings of SPIE (February 11 2011)

Back to Top