22 April 2016 Plasmonic nanohole arrays on Si-Ge heterostructures: an approach for integrated biosensors
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Proceedings Volume 9724, Plasmonics in Biology and Medicine XIII; 97240M (2016) https://doi.org/10.1117/12.2212650
Event: SPIE BiOS, 2016, San Francisco, California, United States
Abstract
Nanohole array surface plasmon resonance (SPR) sensors offer a promising platform for high-throughput label-free biosensing. Integrating nanohole arrays with group-IV semiconductor photodetectors could enable low-cost and disposable biosensors compatible to Si-based complementary metal oxide semiconductor (CMOS) technology that can be combined with integrated circuitry for continuous monitoring of biosamples and fast sensor data processing. Such an integrated biosensor could be realized by structuring a nanohole array in the contact metal layer of a photodetector. We used Fouriertransform infrared spectroscopy to investigate nanohole arrays in a 100 nm Al film deposited on top of a vertical Si-Ge photodiode structure grown by molecular beam epitaxy (MBE). We find that the presence of a protein bilayer, constitute of protein AG and Immunoglobulin G (IgG), leads to a wavelength-dependent absorptance enhancement of ~ 8 %.
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L. Augel, L. Augel, I. A. Fischer, I. A. Fischer, L. A. Dunbar, L. A. Dunbar, S. Bechler, S. Bechler, A. Berrier, A. Berrier, D. Etezadi, D. Etezadi, F. Hornung, F. Hornung, K. Kostecki, K. Kostecki, C. I. Ozdemir, C. I. Ozdemir, M. Soler, M. Soler, H. Altug, H. Altug, J. Schulze, J. Schulze, "Plasmonic nanohole arrays on Si-Ge heterostructures: an approach for integrated biosensors", Proc. SPIE 9724, Plasmonics in Biology and Medicine XIII, 97240M (22 April 2016); doi: 10.1117/12.2212650; https://doi.org/10.1117/12.2212650
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