Paper
16 March 2016 Development of high coherence high power 193nm laser
Satoshi Tanaka, Masaki Arakawa, Atsushi Fuchimukai, Yoichi Sasaki, Takashi Onose, Yasuhiro Kamba, Hironori Igarashi, Chen Qu, Mitsuru Tamiya, Hiroaki Oizumi, Shinji Ito, Koji Kakizaki, Hongwen Xuan, Zhigang Zhao, Yohei Kobayashi, Hakaru Mizoguchi
Author Affiliations +
Abstract
We have been developing a hybrid 193 nm ArF laser system that consists of a solid state seeding laser and an ArF excimer laser amplifier for power-boosting. The solid state laser consists of an Yb-fiber-solid hybrid laser system and an Er-fiber laser system as fundamentals, and one LBO and three CLBO crystals for frequency conversion. In an ArF power amplifier, the seed laser passes through the ArF gain media three times, and an average power of 110 W is obtained. As a demonstration of the potential applications of the laser, an interference exposure test is performed.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Satoshi Tanaka, Masaki Arakawa, Atsushi Fuchimukai, Yoichi Sasaki, Takashi Onose, Yasuhiro Kamba, Hironori Igarashi, Chen Qu, Mitsuru Tamiya, Hiroaki Oizumi, Shinji Ito, Koji Kakizaki, Hongwen Xuan, Zhigang Zhao, Yohei Kobayashi, and Hakaru Mizoguchi "Development of high coherence high power 193nm laser", Proc. SPIE 9726, Solid State Lasers XXV: Technology and Devices, 972624 (16 March 2016); https://doi.org/10.1117/12.2211210
Lens.org Logo
CITATIONS
Cited by 7 scholarly publications.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Excimer lasers

Laser systems engineering

Solid state lasers

Optical amplifiers

Amplifiers

Crystals

High power lasers

RELATED CONTENT

Hybrid high power femtosecond lasers
Proceedings of SPIE (April 22 2016)
High Power Subpicosecond KRF Laser
Proceedings of SPIE (June 23 1986)
High Power Picosecond KRF Laser System
Proceedings of SPIE (March 11 1987)

Back to Top