22 April 2016 High power coatings for line beam laser optics of up to 2-meter in length
Author Affiliations +
Abstract
Laser material processing plays an important role in the fabrication of the crucial parts for state-of-the-art smartphones and tablets. With industrial line beam systems a line shaped beam with a length above one meter and an average power of several thousand watts can be realized. To ensure excellent long axis beam homogeneity, demanding specifications regarding the substrate surface form tolerances and the coating uniformity have to be achieved for each line beam optic. In addition, a high laser damage threshold and a low defect density are required for the coatings. In order to meet these requirements, the MAXIMA ion beam sputtering machine was developed and built by LASEROPTIK. This contribution describes the functional principle of MAXIMA deposition machine, which adapts the ion beam sputtering technology with its highest coating quality to the field of large area deposition. Furthermore, recent developments regarding the process control by optical broadband monitoring are discussed. Finally experimental results on different thin film characteristics as for example the coating uniformity, the microstructure and the laser damage resistance of multilayers are presented.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mathias Mende, Mathias Mende, Jürgen Kohlhaas, Jürgen Kohlhaas, Wolfgang Ebert, Wolfgang Ebert, "High power coatings for line beam laser optics of up to 2-meter in length", Proc. SPIE 9730, Components and Packaging for Laser Systems II, 973015 (22 April 2016); doi: 10.1117/12.2218436; https://doi.org/10.1117/12.2218436
PROCEEDINGS
7 PAGES


SHARE
RELATED CONTENT


Back to Top