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22 April 2016 Optical attachment for spatial transformation of excimer laser beam
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Abstract
The optical attachment for transformation the spatial characteristics of excimer laser has been experimentally investigated. The laser beam of rectangular section with sizes of 3 x 20 mm and divergence of 2 x 5 mrad after passage of an optical attachment got the square form 20 х 20 mm and equal divergence of 5 х 5 mrad orthogonal directions. It is shown, that application of such unit in the facilities for microprocessing of materials simplifies an optical path of illumination module, allows to receive the optimum uniformity of irradiation (within 2 %) at reproductive image with micron accuracy in plane of processed material and to mitigate the beam load on optical elements due to suppression of influence of "hot" points.
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Aleksandr Zhevlakov, Alexsandr Grishkanich, Sergey Kascheev, Veli Kujanpää, Timo Savinainen, and Egor Gavrilov "Optical attachment for spatial transformation of excimer laser beam", Proc. SPIE 9730, Components and Packaging for Laser Systems II, 97301B (22 April 2016); https://doi.org/10.1117/12.2214706
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