14 March 2016 Characterization of surface ablation of dielectrics irradiated by 12-fs laser pulse in air
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Abstract
We develop an experiment of laser-matter interaction in air environment with ultrashort pulses of 12 fs in the context of micromachining. From post-mortem analysis of the sample, we determine the ablation thresholds of fused silica and sapphire exposed to single 12-fs laser pulse. We also analyze the evolution of macroscopic ablation quantities, taking into account the role of nonlinear propagation effects in air prior the target.
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C. Pasquier, M. Sentis, O. Utéza, N. Sanner, "Characterization of surface ablation of dielectrics irradiated by 12-fs laser pulse in air", Proc. SPIE 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI, 97350H (14 March 2016); doi: 10.1117/12.2208035; https://doi.org/10.1117/12.2208035
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