Fundamental investigations of ultrashort-pulse micromachining of different types of crystalline lithium niobate

M. Stolze; T. Herrmann; J. A. L'huillier

doi:10.1117/12.2212531

14 March 2016 Fundamental investigations of ultrashort-pulse micromachining of different types of crystalline lithium niobate

M. Stolze, T. Herrmann, J. A. L'huillier

Author Affiliations +

Proceedings Volume 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI; 97350O (2016) https://doi.org/10.1117/12.2212531
Event: SPIE LASE, 2016, San Francisco, California, United States

Abstract

Characteristics by laser micromachining of congruent, stoichiometric and doped lithium niobate by using ultrashort laser pulses with different wavelengths from ultraviolet up to infrared were investigated. The ablation thresholds were determined in dependence of c⁺-side and accordingly c⁻-side. The strong impact of crystal orientation by micromachining lithium niobate will be additionally shown by the use of a high pulse repetition rate of 1000 kHz. Furthermore, we demonstrate the advantage of processing smooth ridges with high-repetition UV picosecond laser-pulses in combination of post-processing thermal annealing and a low-loss ridge waveguide in congruent LiNbO₃ will be demonstrated.

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M. Stolze, T. Herrmann, and J. A. L'huillier "Fundamental investigations of ultrashort-pulse micromachining of different types of crystalline lithium niobate", Proc. SPIE 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI, 97350O (14 March 2016); https://doi.org/10.1117/12.2212531

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