14 March 2016 Fundamental investigations of ultrashort-pulse micromachining of different types of crystalline lithium niobate
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Abstract
Characteristics by laser micromachining of congruent, stoichiometric and doped lithium niobate by using ultrashort laser pulses with different wavelengths from ultraviolet up to infrared were investigated. The ablation thresholds were determined in dependence of c+-side and accordingly c-side. The strong impact of crystal orientation by micromachining lithium niobate will be additionally shown by the use of a high pulse repetition rate of 1000 kHz. Furthermore, we demonstrate the advantage of processing smooth ridges with high-repetition UV picosecond laser-pulses in combination of post-processing thermal annealing and a low-loss ridge waveguide in congruent LiNbO3 will be demonstrated.
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M. Stolze, T. Herrmann, J. A. L'huillier, "Fundamental investigations of ultrashort-pulse micromachining of different types of crystalline lithium niobate", Proc. SPIE 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI, 97350O (14 March 2016); doi: 10.1117/12.2212531; https://doi.org/10.1117/12.2212531
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