Ultrafast laser ablation of transparent materials

Lara Bauer; Simone Russ; Myriam Kaiser; Malte Kumkar; Birgit Faißt; Rudolf Weber; Thomas Graf

doi:10.1117/12.2212449

14 March 2016 Ultrafast laser ablation of transparent materials

Lara Bauer, Simone Russ, Myriam Kaiser, Malte Kumkar, Birgit Faißt, Rudolf Weber, Thomas Graf

Proceedings Volume 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI; 97350X (2016) https://doi.org/10.1117/12.2212449
Event: SPIE LASE, 2016, San Francisco, California, United States

Abstract

The present work investigates the influence of the pulse duration and the temporal spacing between pulses on the ablation of aluminosilicate glass by comparing the results obtained with pulse durations of 0.4 ps and 6 ps. We found that surface modifications occur already at fluences below the single pulse ablation threshold and that laser-induced periodic surface structures (LIPSS) emerge as a result of those surface modifications. For 0.4 ps the ablation threshold fluences is lower than for 6 ps. Scanning electron micrographs of LIPSS generated with 0.4 ps exhibit a more periodic and less coarse structure as compared to structures generated with 6 ps. Furthermore we report on the influence of temporal spacing between the pulses on the occurrence of LIPSS and the impact on the quality of the cutting edge. Keywords: LIPSS,

Citation Download Citation

Lara Bauer, Simone Russ, Myriam Kaiser, Malte Kumkar, Birgit Faißt, Rudolf Weber, and Thomas Graf "Ultrafast laser ablation of transparent materials", Proc. SPIE 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI, 97350X (14 March 2016); https://doi.org/10.1117/12.2212449

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