14 March 2016 Femtosecond laser processing of transparent materials for assembly-free fabrication of photonic microsensors
Author Affiliations +
Abstract
In this paper, we summarize our recent research progresses on the understanding, design, fabrication, characterization of various photonic sensors for energy, defense, environmental, biomedical and industry applications. Femtosecond laser processing/ablation of various glass materials (fused silica, doped silica, sapphire, etc.) will be discussed towards the goal of one-step fabrication of novel photonic sensors and new enabling photonic devices. A number of new photonic devices and sensors will be presented.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lei Yuan, Yinan Zhang, Jie Huang, Jie Liu, Yang Song, Qi Zhang, Jincheng Lei, Hai Xiao, "Femtosecond laser processing of transparent materials for assembly-free fabrication of photonic microsensors", Proc. SPIE 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI, 97351C (14 March 2016); doi: 10.1117/12.2213883; https://doi.org/10.1117/12.2213883
PROCEEDINGS
8 PAGES


SHARE
Back to Top