Zero degree contour cutting below 100 µm feature size with femtosecond laser

Klaus Stolberg; Susanna Friedel

doi:10.1117/12.2208809

4 March 2016 Zero degree contour cutting below 100 μm feature size with femtosecond laser

Klaus Stolberg, Susanna Friedel

Proceedings Volume 9736, Laser-based Micro- and Nanoprocessing X; 97360F (2016) https://doi.org/10.1117/12.2208809
Event: SPIE LASE, 2016, San Francisco, California, United States

Abstract

By the use of a 16 W femtosecond laser we demonstrate steep wall angles and small feature spacings for non-thermal melt-free laser drilling and contour cutting of 100 to 500 μm thick metals like Cu-alloy, stainless steel, titanium and tantalum as well as for ceramics and polymer (polycarbonate). Especially processing of thin materials is a challenge, because heat accumulation in thermal processing usually causes mechanical distortion or edge melting as well as material.

The combination of beam deflection in trepanning optics and sample motion allowed us to work in a special "laser milling mode" with rotating beam. Zero degree taper angle as well as positive or negative tapers can be achieved at micrometer scale.

Citation Download Citation

Klaus Stolberg and Susanna Friedel "Zero degree contour cutting below 100 μm feature size with femtosecond laser", Proc. SPIE 9736, Laser-based Micro- and Nanoprocessing X, 97360F (4 March 2016); https://doi.org/10.1117/12.2208809

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