6 April 2016 A cantilever based optical fiber acoustic sensor fabricated by femtosecond laser micromachining
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Proceedings Volume 9738, Laser 3D Manufacturing III; 973804 (2016) https://doi.org/10.1117/12.2213614
Event: SPIE LASE, 2016, San Francisco, California, United States
In this paper, we present a pure silica micro-cantilever based optical fiber sensor for acoustic wave detection. The cantilever is directly fabricated by fs laser micromachining on an optical fiber tip functioning as an inline Fabry-Perot interferometer (FPI). The applied acoustic wave pressurizes the micro-cantilever beam and the corresponding dynamic signals can be probed by the FPI. The thickness, length, and width of the micro-cantilever beam can be flexibly designed and fabricated so that the sensitivity, frequency response, and the total measurement range can be varied to fit many practical applications. Experimental results will be presented and analyzed. Due to the assembly free fabrication of the fs-laser, multiple micro-cantilever beams could be potentially fabricated in/on a single optical fiber for quasi-distributed acoustic mapping with high spatial resolution.
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Jie Liu, Jie Liu, Lei Yuan, Lei Yuan, Jie Huang, Jie Huang, Hai Xiao, Hai Xiao, "A cantilever based optical fiber acoustic sensor fabricated by femtosecond laser micromachining", Proc. SPIE 9738, Laser 3D Manufacturing III, 973804 (6 April 2016); doi: 10.1117/12.2213614; https://doi.org/10.1117/12.2213614

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