In this paper, we will discuss different approaches for multibeam processing for utilization of high pulse energies. The combination of diffractive optics and conventional galvometer scanner can be used for high throughput laser ablation, but are limited in the optical qualities. We will show which applications can benefit from this hybrid optic and which improvements in productivity are expected. In addition, the optical limitations of the system will be compiled, in order to evaluate the suitability of this approach for any given application.
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Arnold Gillner, Patrick Gretzki, Lasse Büsing, "High power parallel ultrashort pulse laser processing," Proc. SPIE 9740, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XVI, 974010 (9 March 2016);