14 March 2016 Metal/metal-oxide nanocoatings on black silicon nanograss for enhanced solar absorption and photochemical activity
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Abstract
In this work, we present experimental results showing optical absorption enhancement of silicon wafer through etching and metal/metal-oxide nanolayers deposition. Black silicon nanograss were fabricated from single crystalline silicon by reactive ion etching, and ZnO, Pt, and CeO2 nanolayers were deposited through atomic layer deposition as well as magnetron sputtering. The resulting structure exhibits less than 8% reflection over broadband solar spectrum. The fabricated structures are analyzed by scanning electron microscope, focused ion beam milling slice and view and transverse electron microscope sample preparation. The results are compared to finite difference time domain simulations based on the actual fabricated structures. A study of the influence of various parameters on the geometry of the fabricated micro and nanostructures and the corresponding change in optical properties is also presented. Applications of such highly absorbing metamaterials to solar photocatalysis is discussed.
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Pabitra Dahal, Pabitra Dahal, Raquel Flores, Raquel Flores, Elangovan Elamurugu, Elangovan Elamurugu, Nitul Rajput, Nitul Rajput, Mustapha Jouiad, Mustapha Jouiad, Jaime Viegas, Jaime Viegas, "Metal/metal-oxide nanocoatings on black silicon nanograss for enhanced solar absorption and photochemical activity", Proc. SPIE 9743, Physics, Simulation, and Photonic Engineering of Photovoltaic Devices V, 97431G (14 March 2016); doi: 10.1117/12.2213702; https://doi.org/10.1117/12.2213702
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