24 February 2016 Fabrication of polymer based integrated photonic devices by maskless lithography
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Abstract
We present our recent results on the fabrication of photonic devices such as single-mode and few-mode waveguides, Ycouplers as well as integrated interferometric sensor devices. The devices were created by means of a fabrication method based on maskless lithography, which allows for fabricating embedded integrated polymer elements on a scale of several square centimeters with a resolution down to one micron. We demonstrate the versatility of our approach by presenting first results on photonic structures created by maskless lithography.
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M. Rahlves, M. Rahlves, "Fabrication of polymer based integrated photonic devices by maskless lithography", Proc. SPIE 9745, Organic Photonic Materials and Devices XVIII, 97450D (24 February 2016); doi: 10.1117/12.2213211; https://doi.org/10.1117/12.2213211
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