Characterizations of diffractive microlens in Nb5N6 microbolometers array for THz detection

X. C. Tu; Y. F. Pei; P. Xiao; C. T. Jiang; C. Wan; L. Kang; J. Chen; P. H. Wu

doi:10.1117/12.2209078

25 February 2016 Characterizations of diffractive microlens in Nb₅N₆ microbolometers array for THz detection

X. C. Tu, Y. F. Pei, P. Xiao, C. T. Jiang, C. Wan, L. Kang, J. Chen, P. H. Wu

Proceedings Volume 9747, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications IX; 97470G (2016) https://doi.org/10.1117/12.2209078
Event: SPIE OPTO, 2016, San Francisco, California, United States

Abstract

Diffractive silicon microlens with ten staircases is designed and analyzed in this paper. The power distribution at the focal plane of the microlens is calculated and frequency dependence and focusing performance of the microlens is also evaluated by a FDTD method The simulation results show the diffractive lens has a good ability of focusing at 0.3 THz and around, and thus it can improve the coupling efficiency of the incident power into the Nb₅N₆ microbolometers. Development of a focal plane array (FPA) using such devices as detectors is favorable since diffractive microlens array has many advantages, such as light weight, low absorption loss, high resolution, and the most important point is that the microlens array can be easily integrated by ready mass production using standard micro-fabrication techniques.

Citation Download Citation

X. C. Tu, Y. F. Pei, P. Xiao, C. T. Jiang, C. Wan, L. Kang, J. Chen, and P. H. Wu "Characterizations of diffractive microlens in Nb₅N₆ microbolometers array for THz detection", Proc. SPIE 9747, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications IX, 97470G (25 February 2016); https://doi.org/10.1117/12.2209078

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KEYWORDS

Microlens

Silicon

Terahertz radiation

Microbolometers

Finite-difference time-domain method

Microlens array

Sensors

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