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15 March 2016 Realization of back-side heterogeneous hybrid III-V/Si DBR lasers for silicon photonics
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In this paper, the simulation, design and fabrication of a back-side coupling (BSC) concept for silicon photonics, which targets heterogeneous hybrid III-V/Si laser integration is presented. Though various demonstrations of a complete SOI integration of passive and active photonic devices have been made, they all feature multi-level planar metal interconnects, and a lack of integrated light sources. This is mainly due to the conflict between the need of planar surfaces for III-V/Si bonding and multiple levels of metallization. The proposed BSC solution to this topographical problem consists in fabricating lasers on the back-side of the Si waveguides using a new process sequence. The devices are based on a hybrid structure composed of an InGaAsP MQW active area and a Si-based DBR cavity. The emitted light wavelength is accordable within a range of 20 nm around 1.31μm thanks to thermal heaters and the laser output is fiber coupled through a Grating Coupler (GC). From a manufacturing point of view, the BSC approach provides not only the advantages of allowing the use of a thin-BOX SOI instead of a thick one; but it also shifts the laser processing steps and their materials unfriendly to CMOS process to the far back-end areas of fabrication lines. Moreover, aside from solving technological integration issues, the BSC concept offers several new design opportunities for active and passive devices (heat sink, Bragg gratings, grating couplers enhanced with integrated metallic mirrors, tapers…). These building boxes are explored here theoretically and experimentally.
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Jocelyn Durel, Thomas Ferrotti, Alain Chantre, Sébastien Cremer, Julie Harduin, Stéphane Bernabé, Christophe Kopp, Frédéric Boeuf, Badhise Ben Bakir, and Jean-Emmanuel Broquin "Realization of back-side heterogeneous hybrid III-V/Si DBR lasers for silicon photonics", Proc. SPIE 9750, Integrated Optics: Devices, Materials, and Technologies XX, 97500O (15 March 2016);


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