3 March 2016 Gas sensors using single layer patterned interference optical filters
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Abstract
A method for fabricating filters for fiber optic sensors is presented. The interference filter's construction is laid on it's side to allow for the use of air as the low refractive index material. Bandpass filters tuned to the absorption line of a trace gas can then be used as a sensitive means of detecting gas concentration. Complex filter designs can be fabricated in a single patterned layer. A CO2/CH4 gas sensor is presented as a design example.
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Thomas D. Rahmlow, Thomas D. Rahmlow, Kieran Gallagher, Kieran Gallagher, Robert L. Johnson, Robert L. Johnson, "Gas sensors using single layer patterned interference optical filters", Proc. SPIE 9751, Smart Photonic and Optoelectronic Integrated Circuits XVIII, 97510Z (3 March 2016); doi: 10.1117/12.2213494; https://doi.org/10.1117/12.2213494
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