Paper
3 March 2016 Integrated microsystems for optical sensing and imaging applications
Roman Kleindienst, Stefan Sinzinger
Author Affiliations +
Abstract
Compact optical systems generally form the backbone of integrated optoelectronic microsystems. Miniaturization as well as integration requirements result in system configurations with folded optical axis such as in planar integrated freespace optics. For optimum performance in such systems geometries, the surface profiles of the corresponding optical elements deviate from classical spherical or aspherical shapes. Optimized plane-symmetric or freeform optical elements are required instead. We discuss design, fabrication and characterization of freeform optical elements for the integration of optical microsystems. The systems performance is demonstrated for imaging as well as sensor applications.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Roman Kleindienst and Stefan Sinzinger "Integrated microsystems for optical sensing and imaging applications", Proc. SPIE 9751, Smart Photonic and Optoelectronic Integrated Circuits XVIII, 975110 (3 March 2016); https://doi.org/10.1117/12.2218237
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Integrated optics

Imaging systems

Optical design

Freeform optics

Beam shaping

Gas sensors

Microsystems

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