14 March 2016 Hybrid silicon-vanadium dioxide electro-optic modulators
Author Affiliations +
Proceedings Volume 9752, Silicon Photonics XI; 975203 (2016) https://doi.org/10.1117/12.2213372
Event: SPIE OPTO, 2016, San Francisco, California, United States
Abstract
Small-footprint, low-power devices that can modulate optical signals at THz speeds would transform next-generation onchip photonics. We describe a hybrid silicon–vanadium dioxide (Si-VO2) electro-optic ring resonator modulator as a candidate platform for achieving this performance benchmark. Vanadium dioxide (VO2) is a strongly correlated material exhibiting a semiconductor-to-metal transition (SMT) accompanied by large changes in electrical and optical properties. While VO2 can be switched optically on a sub-picosecond time scale, the ultimate electrical switching speed remains to be determined. In a 5 μm radius Si-VO2 ring resonator, we achieve 1.5 dB modulation in response to a 10 ns square voltage pulse of 2.5 V. In the steady state regime, we report a modulation depth of 10 dB. The larger modulation depth at longer timescales is attributed to a Joule heating contribution. Experimental results, corroborated by FDTD simulations, reveal the relationship between the portion of a VO2 patch undergoing the SMT and the resulting effects on the Si-VO2 device performance. This work indicates that with further reduction of VO2 patch sizes and increase in resonator Q factor, there is promise for the Si-VO2 ring resonator electro-optic modulator as a competitive option for on-chip photonics technology.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kevin J. Miller, Kevin J. Miller, Petr Markov, Petr Markov, Robert E. Marvel, Robert E. Marvel, Richard F. Haglund, Richard F. Haglund, Sharon M. Weiss, Sharon M. Weiss, "Hybrid silicon-vanadium dioxide electro-optic modulators", Proc. SPIE 9752, Silicon Photonics XI, 975203 (14 March 2016); doi: 10.1117/12.2213372; https://doi.org/10.1117/12.2213372
PROCEEDINGS
7 PAGES


SHARE
Back to Top