Stacked double-layer nanomembrane Fano modulators

Yichen Shuai; Deyin Zhao; Corey Stambaugh; John Lawall; Weidong Zhou

doi:10.1117/12.2209386

14 March 2016 Stacked double-layer nanomembrane Fano modulators

Yichen Shuai, Deyin Zhao, Corey Stambaugh, John Lawall, Weidong Zhou

Author Affiliations +

Proceedings Volume 9752, Silicon Photonics XI; 975205 (2016) https://doi.org/10.1117/12.2209386
Event: SPIE OPTO, 2016, San Francisco, California, United States

Abstract

We report a novel bi-layer photonic crystal slab (PCS) Fano modulator via a coupled double-layer Si nanomembrane (SiNM) capacitor like structure. Surface normal incident light intensity modulation near 1500nm was achieved by carrier accumulation induced resonance spectral shifting. Device performance simulation suggests the opportunity for high speed modulation exceeding GHz with 20μm × 20μm device size.

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Yichen Shuai, Deyin Zhao, Corey Stambaugh, John Lawall, and Weidong Zhou "Stacked double-layer nanomembrane Fano modulators", Proc. SPIE 9752, Silicon Photonics XI, 975205 (14 March 2016); https://doi.org/10.1117/12.2209386

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