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15 March 2016 Bimorph actuators in thick SiO2 for photonic alignment
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Proceedings Volume 9753, Optical Interconnects XVI; 975311 (2016) https://doi.org/10.1117/12.2209499
Event: SPIE OPTO, 2016, San Francisco, California, United States
Abstract
This paper proposes and tests a design of electro-thermal bimorph actuators for alignment of flexible photonic waveguides fabricated in 16 µm thick SiO2. The actuators are for use in a novel alignment concept for multi-port photonic integrated circuits (PICs), in which the fine alignment is taken care of by positioning of suspended, mechanically flexible waveguide beams on one or more of the PICs. The design parameters of the bimorph actuator allow to tune both the initial relative position of the waveguide end-facets, and the motion range of the actuators. Bimorph actuators have been fabricated and characterized. The maximum out-of-plane deflection of the bimorph actuator (with 720 μm-long poly-Si) can reach 18:5 μm with 126:42mW, sufficient for the proposed application.
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Kai Wu, Tjitte-Jelte Peters, Marcel Tichem, Ferry Postma, Albert Prak, Kerstin Wörhoff, and Arne Leinse "Bimorph actuators in thick SiO2 for photonic alignment", Proc. SPIE 9753, Optical Interconnects XVI, 975311 (15 March 2016); doi: 10.1117/12.2209499; https://doi.org/10.1117/12.2209499
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